| Model |
GX-1050A |
GX-800A |
GX-900A |
GX1200A |
| Film-plating Cavity Dimension |
§¶1050¡Á1250£¬304Stainless
Steel |
§¶800¡Á1000
|
§¶900¡Á1050
|
§¶1200¡Á1250
|
Film-plating
Cavity Inner Dimension |
Kickstand
of tooling jig is 1680mm away from the ground
which is the operative height suitable for Human
Factors Engineering. |
Kickstand
of tooling jig is 1468mm away from the ground
which is the operative height suitable for Human
Factors Engineering. |
Kickstand
of tooling jig is 1518mm away from the ground
which is the operative height suitable for Human
Factors Engineering. |
1.
Vaulted single-workpiece tray further satisfies
customer requirement for equality. Rotating
speed is 5-30r.min with stepless speed variation.
2. Vaulted three-workpiece tray carries out
planet revolution and rotation and further satisfies
customer requirement for output. Rotating speed
is 5-30r.min with stepless speed variation.
|
Tooling
Jig |
Vaulted
four-sheet packaging, slanting angle of kickstand
is adjustable and further satisfies customer
requirement for equality. Rotating speed is
5-30r.min with stepless speed variation. |
Vaulted
single-workpiece tray further satisfies customer
requirement for equality. Rotating speed is
5-30r.min with stepless speed variation. |
Vaulted
single-workpiece tray further satisfies customer
requirement for equality. Rotating speed is
5-30r.min with stepless speed variation. |
Vacuum
System |
Machine
Group: Diffusionpump DIP-12000 (Leybold), Roots
pump ZJY-300, mechanical pump 2X-70 and maintaining
pump 2X-8. Pipeline is 304 stainless steel.
|
Machine
Group: Diffusion pump KT-400 (Zhenhua), Roots
pump ZJY-150, mechanical pump 2X-70 and maintaining
pump 2X-8. |
Machine
Group: Diffusion pump KT-600 (Zhenhua), Roots
pump ZJY-150, mechanical pump 2X-70 and maintaining
pump 2X-8. |
Machine
Group: Diffusion pump KT-800 (Zhenhua), Roots
pump ZJY-600, mechanical pump 2X-70 and maintaining
pump 2X-8. |
Ultimate
Vacuum: Superior to 4¡Á10-4Pa. |
| Equipped
with onflow-resisting set, safe interlock design,
manual and automatic operation to choose from.
|
Heating
System |
Heating
tube for heating, PID control and highest temperature
being 350¡æ¡À1.5¡æ. |
Working
Gas Inflation |
Gas
quality flux controlling meter or manual micro-adjusted
inflation valve |
Vacuum
Ionization Impact |
DC
3KV and 0.6KW bar-like cathode. (Used for self-clean
the workpiece before plating the film.) |
| Evaporation
Source(Selectable) |
1.
TELEMARK-270¡ãelectronic gun (imported): 6KW and
high voltage between adjustable 4KV-10KV. Preview
scan, triangle wave scan, round scan and spiral
scan. Good beam spot focusing property, high position
accuracy and good scan reshowing property.
2. Home-made Electronic Gun (Zhenhua): 6KW and
high voltage between adjustable 4KV-8KV and can
freely choose from triangle wave scan, sine wave
scan and square wave scan.
3. Crucible: 6-hole¦µ38¡Á20 crucible or cambered
crucible with diameter of 4 holes being 38¡Á20
and central radian of a hold being 87 (Used for
large-consumption and low-melting point evaporating
material) or 4-hole ¦µ48¡Á18 crucible. |
| Ion
Source(Selectable) |
1.RF
(Radio Frequency Type) ion source (imported).
2. 5KVA Hall ion source (Zhenhua) is used for
cleaning before plating or subsidiary plating
during the plating process, which is helpful for
improving refractive index, fastness, density
and adhesive force of the film layer. |
| Film
Thickness Controlling System(Selectable) |
1.
MDC-360 Deposition Controller (imported): Can
store automatic film-plating process of 1-99 layer,
99 kinds of program data with the accuracy being
0.5% and with 1? of fixed error.
2. TELEMARK-880 Deposition Controller (imported):
Can store automatic film-plating process of 1-99
layer, 99 kinds of program data with the accuracy
being 0.5% and with 1? of fixed error. 3. TELEMARK-820
Light Controller (imported): Adopt multi-wavelength
full-spectrum terminal analysis technology. Judge
that the film layer has ended though curve analysis
to transmission ratio (or reflectivity) of monitoring
sheet which is 370-870©L thick. Have high controlling
accuracy, can also adopt single-wavelength control,
automatic control and manual control. The attached
MACILEOD film is computer software with high degree
of integration.
4. TELEMARK-820 light controller together with
TELEMARK-880 deposition controller can satisfy
high-accuracy and high-repeatability film-plating
requirement. Can realize full automatic control
if combined with the upper machine.
5. Wavelength of home-made light controller (Such
as 9704 supporting single-color meter and etc.)
is adjustable between 330-870 and the accuracy
can reach ¡À1.5nm. |
Manual
Handler |
With
magnetic bottom seat and can be set at any place
of the vacuum chamber door and the controlling
cabinet. |
