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¡¡¡¡Vacuum
arc coating equipment, crystallizing new technologies
developed in the recent years, is not only used for decorative
films such as, golden-TiN, black Tic, muliply-color TiNO,
but also for anti-corrosion films (AL, Gr, Stainless and
TiN) and antifriction films. There is better adhesion
between the films and substrates. The equipment has been
used in industries of watch, hardware, dishware, super
anti-wear hard cutters and moulds. It has great expectation
in the future. |
Technical
Data Table
| Specification\Model |
TG-4A |
TG-6A |
TG-10A |
| Chamber
Size |
§¶800X1000 |
§¶900X1200 |
§¶1200X1500 |
| Ultimate
Pressure |
10-4Pa |
| Pumping
Down Time |
Atmosphere
to 6.6X10-2Pa£¼10min in
empty condition |
| Power
of Arc Source |
4
x 2KW |
6
x 2KW |
10
x 2KW |
| DC
Negative Bias |
0-1000V
¡¡10A
0-500V ¡¡20A |
0-1000V
¡¡12A
0-500V ¡¡25A |
0-1000V
¡¡20A
0-500V ¡¡30A |
| Size
of Parts |
6
shafts §¶220X800 |
6
shafts §¶250X1000 |
6
shafts §¶280X1300 |
| Heating
Power Consumption |
15KW |
20KW |
25KW |
| Total
Power Capacity/ Average Power Capacity |
40KW/25KW |
50KW/30KW |
58KW/35KW |
Power
of DC Magnetron Target (Plane or Column) |
10KW |
15KW |
20KW |
Mass
Flow Controller |
Three
Way |
Three
Way |
Three
Way |
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