| |
Chamber
Size |
Shaft
and Diameter |
Vacuum
System |
Power |
Remark |
| ZH-§¶1000 |
§¶1000X1800 |
6
shafts §¶310 |
KT-400¡¢ZJ-300¡¢2X-70 |
Average:
15KW
Max. power in short time: 30KW |
Atmosphere
to 5X10-2Pa less
than 8 min (no load) |
| ZH-§¶1200 |
§¶1200X1800 |
6
shafts §¶380 |
KT-600¡¢ZJ-300¡¢2X-70 |
Average:
25KW
Max. power in short time: 40KW |
| ZH-§¶1400 |
§¶1400X2000 |
6
shafts §¶450 |
KT-600¡¢ZJ-600¡¢H-150 |
Average:
30KW
Max. power in short time: 50KW |
| ZH-§¶1500 |
§¶1500X2000 |
6
shafts §¶480 |
KT-800¡¢ZJ-1200¡¢H-150 |
Average:
40KW
Max. power in short time: 60KW |
| ZH-§¶1600 |
§¶1600X2000 |
6
shafts §¶510 |
KT-800¡¢ZJ-1200¡¢H-150 |
Average:
40KW
Max. power in short time: 60KW |
| ZH-§¶1700 |
§¶1700X2000 |
6
shafts §¶550
8 shafts §¶470 |
KT-800¡¢ZJ-1200¡¢H-150 |
Average:
40KW
Max. power in short time: 60KW |
| ZHL-§¶1600 |
§¶1600X1950 |
6
shafts §¶520 |
KT-800¡¢ZJ-1200¡¢H-150 |
Average:
40KW
Max.
power in short time: 60KW |
Vertical |
| ZHL-§¶1800 |
§¶1800X1950 |
6
shafts §¶580
8 shafts §¶470 |
KT-800(two
sets)¡¢ZJ-1200¡¢H-150 |
Average:
40KW
Max.
power in short time: 60KW |